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SF6 plasmas coupling reaction kinetics in the gas phase and on the surface which are integrated over a Druyvesteyn electron energy distribution function

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【PDF】for SF6 plasmas coupling reaction kinetics in the gas

SF6 plasmas coupling reaction kinetics in the gas phase and on the surface which are integrated over a Druyvesteyn electron energy distribution function

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【PDF】for SF6 plasmas coupling reaction kinetics in the gas

SF6 plasmas coupling reaction kinetics in the gas phase and on the surface which are integrated over a Druyvesteyn electron energy distribution function

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【PDF】for SF6 plasmas coupling reaction kinetics in the gas

SF6 plasmas coupling reaction kinetics in the gas phase and on the surface which are integrated over a Druyvesteyn electron energy distribution function

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SF6 plasmas coupling reaction kinetics in the gas phase and on the surface which are integrated over a Druyvesteyn electron energy distribution function

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